The clean room located in Science and Engineering Research Complex (SERC) is equipped with instruments and tools for nano/micro device prototyping and characterization. This facility hosts a 3,000 square feet class 100 space and 800 square feet class 10 space.

• FEI XL-30FEG SEM equiped with NPGS (nanopattern generation system)
• FEI 235 Dual-Beam Focused Ion-beam System
• AJA UHV multi-source sputtering system
• Bosch high vacuum sputtering system
• Oxford Plasma Lab 80 Plus RIE
• Oxford Plasma Lab 100 RIE
• Oxford Plasma Lab ICP 180 RIE
• Kasper Mask Aligner
• Alpha-Step 200 Profilometer
• Custom High-Rate Ion Mill
• Brewer Cee 200 Spin Coater
• Gaertner Ellipsometer
• Solvant (3) and Acid (1) Exhausted Wet Benches